Exploring Equipment Electrocardiogram Mechanism for Performance Degradation Monitoring in Smart Manufacturing

Manufacturing Intelligence for Equipment Condition Monitoring in Semiconductor Manufacturing

For modern semiconductor manufacturing, a large number of interrelated equipment data are automatically collected. These data are usually used for fault detection and classification (FDC). However, unusual measurements may reflect a wafer defect or a change in equipment conditions. Early detection of the equipment condition changes assists with efficient maintenance. This study aimed to develop...

Smart Condition Monitoring of Power System Equipment

During the last three decades, there have been many new developments in condition monitoring (CM) of high voltage equipment in electrical power systems. Hundreds of new instruments are in use around the world. Enormous quantities of CM data are collected from on-line and off-line tests every day. Now it might be the right time to ask “Are we using CM instruments wisely?” In fact, one of the pro...

Useful Methods for Improving Equipment Performance in Manufacturing

Identifying Performance Assurance Challenges for Smart Manufacturing.

Smart manufacturing has the potential to address many of the challenges faced by industry. However, the manufacturing community often needs assistance to leverage available technologies to improve their systems. To assure the performance of these technologies, this paper proposes a shared knowledge base that collects problem areas, solutions, and best practices for manufacturing technology. An ...

Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing

Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing Chia-Yu Hsu, Chen-Fu Chien* and Pei-Nong Chen Department of Information Management, Yuan Ze University, 135 Yuan-Tung Road, Chungli 32003, Taiwan, Republic of China; Department of Industrial Engineering and Engineering Management, National Tsing Hua University, 1...